micromachine

noun mi·cro·ma·chine \ ˌmī-krō-mə-ˈshēn \

Definition of micromachine

: a device or machine constructed on a microscopic scale
  • The hardest material, and one of the most chemically inert, diamond is extremely difficult to fabricate into electronic devices or micromachines.
  • Physics Today
; especially : such a device constructed using the techniques of lithography
  • Unlike the way Swiss watches are made, silicon micromachines are built in one piece and ready to go. Their three-dimensional structures are created by stacking up a series of very thin, carefully detailed layers of silicon, each one deposited directly on the layer before. As a final step, acid etches away the in-between "sacrificial" layers to free the moving parts.
  • —Doug Stewart

First Known Use of micromachine

1971


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