Definition of micromachine
- The hardest material, and one of the most chemically inert, diamond is extremely difficult to fabricate into electronic devices or micromachines.
- —Physics Today
- Unlike the way Swiss watches are made, silicon micromachines are built in one piece and ready to go. Their three-dimensional structures are created by stacking up a series of very thin, carefully detailed layers of silicon, each one deposited directly on the layer before. As a final step, acid etches away the in-between "sacrificial" layers to free the moving parts.
- —Doug Stewart