Definition of micromachine
: a device or machine constructed on a microscopic scale The hardest material, and one of the most chemically inert, diamond is extremely difficult to fabricate into electronic devices or micromachines. — Physics Today; especially : such a device constructed using the techniques of lithography Unlike the way Swiss watches are made, silicon micromachines are built in one piece and ready to go. Their three-dimensional structures are created by stacking up a series of very thin, carefully detailed layers of silicon, each one deposited directly on the layer before. As a final step, acid etches away the in-between “sacrificial” layers to free the moving parts. — Doug Stewart
First Known Use of micromachine
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