Definition of silicon tetrafluoride
: a colorless fuming suffocating gas SiF4 made by the action of fluorine on silicon or of hydrofluoric acid on silica or silicates (such as glass) and used chiefly in making fluosilicic acid and fluosilicates
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“Silicon tetrafluoride.” Merriam-Webster.com Dictionary, Merriam-Webster, https://www.merriam-webster.com/dictionary/silicon%20tetrafluoride. Accessed 9 Mar. 2021.
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