microelectromechanical
adjective
                                                                                                                            
                                                            mi·cro·elec·tro·me·chan·i·cal
                    
                                                                                                              
                                                                                                                                  ˌmī-krō-i-ˌlek-trō-mə-ˈka-ni-kəl  
                                                      
                                                          
            
                                
              
          
                                                      : composed of microscopic electronic and mechanical elements                                      
              
                             
Researchers at Los Alamos National Laboratory, in New Mexico, think they may have the answer to a vexing problem called stiction, which causes ultrasmall components of microelectromechanical systems (MEMS) to stick together.— Saswato R. Das
Saswato R. Das
                         
                
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  Merriam-Webster unabridged




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