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mi·cro·elec·tro·me·chan·i·cal | \ ˌmī-krō-i-ˌlek-trō-mə-ˈka-ni-kəl 
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\Definition of microelectromechanical
: composed of microscopic electronic and mechanical elements
Researchers at Los Alamos National Laboratory, in New Mexico, think they may have the answer to a vexing problem called stiction, which causes ultrasmall components of microelectromechanical systems (MEMS) to stick together.— Saswato R. Das
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The first known use of microelectromechanical was in 1987
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