Definition of chlorosilane
1 : a gas SiH3Cl derived from monosilane —called also monochlorosilane
2 : a chlorine derivative of a silane; especially : a derivative [as dimethyl-dichloro-silane (CH3)2SiCl2] of an organic silane used in making silicones —called also organochlorosilane
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Origin and Etymology of chlorosilane
chlor- + silane
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