chlorosilane

noun
chlo·​ro·​silane
plural -s

Definition of chlorosilane 

1 : a gas SiH3Cl derived from monosilane

called also monochlorosilane

2 : a chlorine derivative of a silane especially : a derivative [as dimethyl-dichloro-silane (CH3)2SiCl2] of an organic silane used in making silicones

called also organochlorosilane

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History and Etymology for chlorosilane

chlor- + silane

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