microelectromechanical systems
MEMS stands for microelectromechanical systems, which combine tiny mechanical components, such as gears and levers, with microelectronic circuitry.P. Weiss

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“MEMS.” Merriam-Webster.com Dictionary, Merriam-Webster, https://www.merriam-webster.com/dictionary/MEMS. Accessed 22 Apr. 2024.

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