chemical vapor deposition

noun

Definition of chemical vapor deposition

: a technique for depositing a usually thin solid layer of a substance on a surface as the result of vapor-phase chemical reactions in a high temperature gas in close proximity to the surface — compare atomic layer deposition

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Cite this Entry

“Chemical vapor deposition.” Merriam-Webster.com Dictionary, Merriam-Webster, https://www.merriam-webster.com/dictionary/chemical%20vapor%20deposition. Accessed 9 Aug. 2020.

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